Glassy Carbon: A Promising Material for Micro- and Nanomanufacturing
نویسندگان
چکیده
منابع مشابه
Stencil Lithography for Scalable Micro- and Nanomanufacturing
In this paper, we review the current development of stencil lithography for scalable microand nanomanufacturing as a resistless and reusable patterning technique. We first introduce the motivation and advantages of stencil lithography for large-area microand nanopatterning. Then we review the progress of using rigid membranes such as SiNx and Si as stencil masks as well as stacking layers. We a...
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ژورنال
عنوان ژورنال: Materials
سال: 2018
ISSN: 1996-1944
DOI: 10.3390/ma11101857