High concentration factor diffractive microlenses integrated with CMOS single-photon avalanche diode detector arrays for fill-factor improvement
نویسندگان
چکیده
منابع مشابه
Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays.
Single-photon avalanche diode (SPAD) detector arrays generally suffer from having a low fill-factor, in which the photo-sensitive area of each pixel is small compared to the overall area of the pixel. This paper describes the integration of different configurations of high efficiency diffractive optical microlens arrays onto a 32 × 32 SPAD array, fabricated using a 0.35 µm CMOS technology proce...
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Single-photon avalanche diode (SPAD) imagers typically have a relatively low fill factor, i.e. a low proportion of the pixel's surface is light sensitive, due to in-pixel circuitry. We present a microlens array fabricated on a 128×128 single-photon avalanche diode (SPAD) imager to enhance its sensitivity. The benefits and limitations of these light concentrators are studied for low light imagin...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2020
ISSN: 1559-128X,2155-3165
DOI: 10.1364/ao.388993