High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has four-cantilever beam integrated inertial mass unit structure, with advantages of being lightweight and highly sensitive. A theoretical energy harvesting model established cantilever beam, geometric dimensions structure microdevice were optimized meet vibration pickup conditions. The sol-gel annealing technology employed prepare high-quality PZT thin films on silicon substrate, microdevices manufactured by using technology. Furthermore, packaged testing measuring platform. Test results show that PMA resonant frequency 2300 Hz. addition, there is good linear relationship between input acceleration output voltage, V = 8.412a − 0.212. not only high sensitivity, but also outstanding anti-interference ability. into hydrophone calibration system. (PVH) sensitivity –178.99 dB@1000 Hz (0 dB 1 V/μPa) bandwidth 20~1100 Meanwhile, it exhibits “8” shape directivity consistency each channel. These demonstrate excellent capabilities suitable use hydrophones.