Highly Sensitive Inertial Micro-Switch for Achieving Adjustable Multi-Threshold Acceleration

نویسندگان

چکیده

An inertial micro-switch with multi-threshold acceleration detection capability has been proposed, taking advantage of electromechanical coupling behavior. A mathematical model behavior was established to display the dependence highly sensitivity on pull-in characteristic and show ability detect threshold by controlling voltage applied micro-switch. The that described in implemented occur at switch showed agreement a simulation. Inertia switches were comprised various microstructures dimensions ranging 3.5 µm from 180 manufactured means micro-electro-mechanical system (MEMS) manufacturing process, their functions evaluated dropping system. control method related obtained analyzing effect structural parameters acceleration, resulting relatively small error between simulation experiment. high achieving 30 V, sense 500 g 2000 2.46 ms provided enough time for outputting signal. Furthermore, can be adjusted micro-switches. In addition, other micro-switches, such as lower residual stress, recoverability, repeatability, have displayed.

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ژورنال

عنوان ژورنال: Actuators

سال: 2023

ISSN: ['2076-0825']

DOI: https://doi.org/10.3390/act12020053