Highly Tunable Electrothermally and Electrostatically Actuated Resonators
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2016
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2016.2542338