Identifying Key Factors towards Highly Reflective Silver Coatings
نویسندگان
چکیده
منابع مشابه
Silver-based reflective coatings for micromachined optical filters
Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Using a silicon nitride membrane under tension, within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, with square aperture of up to 2x2 mm and an electrostat...
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ژورنال
عنوان ژورنال: Advances in Materials Science and Engineering
سال: 2017
ISSN: 1687-8434,1687-8442
DOI: 10.1155/2017/7686983