Immersion scatterometry for improved nano-scale topography measurements
نویسندگان
چکیده
منابع مشابه
Precise and rapid distance measurements by scatterometry.
We found that the distances between isolated scatterers with similar columnar shapes could be measured by taking a single Fourier transform of their diffraction intensity. If the scatterers have different shapes, the distances between similar shapes can be selected from the distances between all the shapes. The distance from a specific scatterer can be measured with a resolution of 0.8 waveleng...
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ژورنال
عنوان ژورنال: physica status solidi (a)
سال: 2008
ISSN: 1862-6300,1862-6319
DOI: 10.1002/pssa.200777756