Individual ignition of RF microplasma array at atmospheric pressure

Following the trend of miniaturization in semiconductor industry, atmospheric plasma jets array configuration were developed for cleaning or treatment workpieces under homogeneous conditions. We describe here first, development a small five individual identical cells where each cell is ignited and quenched individually, which can be upscaled to several tens hundreds cells. The power electronics ignition composed multiplexing system with kHz high-voltage pulse an RF-supply that distributed maintain respective cell. Experimental results show voltage argon 1300 V RF-current per 70 mA.