Initial fabrication and characterization of chemically etched silicon slits for KOSMOS

Wet – Chemically Etched Silicon Nanowire Solar Cells: Fabrication and Advanced Characterization

Chemically etched ultrahigh-Q wedge-resonator on a silicon chip

Ultrahigh-Q optical resonators are being studied across a wide range of fields, including quantum information, nonlinear optics, cavity optomechanics and telecommunications1–7. Here, we demonstrate a new resonator with a record Q-factor of 875 million for on-chip devices. The fabrication of our device avoids the requirement for a specialized processing step, which in microtoroid resonators8 has...

Morphological, structural and photoresponse characterization of ZnO nanostructure films deposited on plasma etched silicon substrates

ZnO nanostructure films were deposited by radio frequency (RF) magnetron sputtering on etched silicon (100) substrates using dry Ar/SF6 plasma, at two etching times of 5 min and 30 min, and on non etched silicon surface. Energy dispersive X-ray (EDX) technique was employed to investigate the elements contents for etched substrates as well as ZnO films, where it is found to be stoichiometric. Su...

Fabrication and Characterization of Nanoporous Energetic Silicon

Arising as a new class of energetic material, nanoporous energetic silicon holds great potential for applications such as fuzing and thrust generation, which require large power output. In this paper we address fabrication and material characterization as well as monolithic integration of a hotwire initiator and packaging; the first steps toward a fully integrated MEMS/IC/energetic material sys...

Fabrication of micropillar substrates using replicas of alpha-particle irradiated and chemically etched PADC films.

We proposed a simple method to fabricate micropillar substrates. Polyallyldiglycol carbonate (PADC) films were irradiated by alpha particles and then chemically etched to form a cast with micron-scale spherical pores. A polydimethylsiloxane (PDMS) replica of this PADC film gave a micropillar substrate with micron-scale spherical pillars. HeLa cells cultured on such a micropillar substrate had s...