Initial sinterability of .ALPHA.-silicon nitride with addition of beryllium oxide.
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چکیده
منابع مشابه
Selective reactive ion etching of silicon nitride over silicon using CHF3 with N2 addition
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ژورنال
عنوان ژورنال: Journal of the Society of Materials Science, Japan
سال: 1987
ISSN: 1880-7488,0514-5163
DOI: 10.2472/jsms.36.1