Interdiffusion in Cu/Capping Layer/NiSi Contacts
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Korean Journal of Materials Research
سال: 2007
ISSN: 1225-0562
DOI: 10.3740/mrsk.2007.17.9.463