Intermittent failure mechanism and stabilization of microscale electrical contact

Abstract The stability and lifetime of electrical contact pose a major challenge to the performance microelectro-mechanical systems (MEMS), such as MEMS switches. microscopic failure mechanism still remains largely unclear. Here conductive atomic force microscopy with hot switching mode was adopted simulate asperity-level condition in switch. Strong variation fluctuation current adhesion were observed during 10,000 repetitive cycles, exhibiting an “intermittent failure” characteristic. This properties attributed insulative carbonaceous contaminants repetitively formed removed at spot, corresponding degradation reestablishment contact. When contaminant film formed, interface became “metal/carbonaceous adsorbates/metal” instead direct metal/metal contact, leading state. Furthermore, system iridium/graphene on ruthenium (Ir/GrRu) proposed avoid which stabilized decreased interfacial significantly. existence graphene enabled less adsorption ambient air enhanced mechanical protection against actions. work opens avenue for design fabrication microscale system, especially by utilizing two-dimensional materials.