Laser Micro-Fabrication to Form Mirror-Dimple Structure
نویسندگان
چکیده
منابع مشابه
Design and fabrication of scanning mirror for laser display
A 1500mm 1200 mm silicon scanning mirror for laser display has been designed and fabricated by deep inductively coupled plasma reactive ion etching (ICPRIE) and flip chip bonding technology. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. The upper structure is composed of a scanning mirror plate, two torsion bars, a supporting frame ...
متن کاملPicosecond laser ablation for silicon micro fuel cell fabrication
We have investigated laser ablation as a microfabrication approach to produce micro fuel cells (MFCs) in silicon. Picosecond pulses (15 ps) at a wavelength of 355 nm are used to make all of the MFC structures. To assess the benefits and drawbacks of laser ablation, reference cells have been produced by deep reactive ion etching (DRIE) using matching geometries. Ablated and etched cells have bee...
متن کاملFabrication of micro-axicons using direct-laser writing.
A novel direct-laser writing fabrication process for micro-axicons is demonstrated. A fiber-axicon-generated Bessel beam was utilized to write on UV-curable optical epoxy to form new axicons and axicon arrays, and geometrical parameters of the replicated epoxy axicons were analyzed in terms of both apex angle and proximity of the writing axicons. The shape of the fabricated axicons was demonstr...
متن کاملThree Dimensional Micro/Nano-structure Fabrication of Phase-change Film
Department of Electrical and Computer Engineering, National University of Singapore, 1 Engineering Drive 3, Singapore 117576 2 Data Storage Institute, DSI Building, 5 Engineering Drive 1, Singapore 117608 3 Nanoscience & Nanotechnology Initiative, National University of Singapore, 2 Engineering Drive 3, Singapore 117576 4 Department of Mechanical Engineering, National University of Singapore, 2...
متن کاملFree-Form Mirror Design
A considerable issue in designing catadioptric imaging systems is what shape the component mirrors should be formed. In this paper, we propose a new algorithm for a catadioptric imaging system that satisfies the desired projection using a free-form mirror. A free-form mirror expressed as an assembly of gradients is a flexible surface representation that can form various shapes including non-smo...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2009
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.75.762