Mass Sensitive, Lorentz-Force Actuated, MEMS Preconcentrator and Chemical Sensor
نویسندگان
چکیده
منابع مشابه
Design of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...
متن کاملMEMS Bragg grating force sensor.
We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which ...
متن کاملOptical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor
Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor is designed, fabricated and optically characterized. The sensor is fabricated by using CMOS thin l...
متن کاملDesign, Fabrication, and Evaluation of Highly Sensitive Compact Chemical Sensor System Employing a Microcantilever Array and a Preconcentrator
We developed a highly sensitive compact chemical sensor system employing a polymer-coated microcantilever sensor array and a thermal preconcentrator. The design, structure, fabrication, and experiment results are reported here. This sensor system had 1) a sub-ppb detection limit concentrated by a preconcentrator and 2) analytical function by thermal desorption of the preconcentrator and multipl...
متن کاملThermally Actuated Low Impedance MEMS Resonators for Mass Sensing Applications
This paper presents high-Q thermally actuated micromechanical resonators suitable for sensory applications under atmospheric pressure. Single crystal silicon resonators with resonance frequencies in the 250 KHz to 1.5MHz range were fabricated using a single-mask fabrication process on SOI substrates. The resonators were operated in a one-port configuration in their in-plane resonance mode with ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: ECS Transactions
سال: 2019
ISSN: 1938-6737
DOI: 10.1149/1.2981117