Mass spectroscopy of oxygen plasmas with energetic ions
نویسندگان
چکیده
An experimental study of the plasma gas phase in low pressure radiofrequency discharges oxygen is presented. The has been studied by means mass spectroscopy neutral and charged species, directly sampling phase. We also measured ion energy distributions. have influence operating conditions on gas-phase composition. Ion density as a function discharge parameters. In particular, we identified allowing extraction ions from state with energies exceeding 50 eV. This makes processing energetic feasible our device.
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ژورنال
عنوان ژورنال: AIP Advances
سال: 2023
ISSN: ['2158-3226']
DOI: https://doi.org/10.1063/6.0002313