Measurement of gas pressure by double-cavity comparison refractive index method
نویسندگان
چکیده
A gas pressure measurement device is built based on the refractive index method, and range from 10 kPa to 100 kPa, tested by a dual-cavity comparison method. The temperature of two vacuum chambers separately controlled cavities are connected ensure that pressures in same. Using high-purity nitrogen (6N) as medium, under condition different pressures, comparative measurements conducted. results show optical gauge has repeatability better than 30 × 10<sup>–6</sup>, which significantly commercial capacitive gauge, indicating this method great potential applications. Sources error uncertainty analyzed, it planned design new system improve measurement.
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ژورنال
عنوان ژورنال: Chinese Physics
سال: 2022
ISSN: ['1000-3290']
DOI: https://doi.org/10.7498/aps.71.20212234