Mechanical dissipation by substrate–mode coupling in SiN resonators

State-of-the-art nanomechanical resonators are heralded as a central component for next-generation clocks, filters, resonant sensors and quantum technologies. To practically build these technologies will require monolithic integration of microchips, readout systems. While it is widely seen that mounting microchip substrates into system can greatly impact the performance high-Q resonators, systematic study has remained elusive, owing to variety physical processes factors influence dissipation. Here, we analytically analyze mechanism by which couple manufactured on them, experimentally demonstrate this coupling increase mechanical dissipation when resonance frequencies resonator substrate coincide. More generally, then show similar exist between two adjacent resonators. Since substrate-mode strongly depends both position substrate, work provides key design guidelines high-precision