MEMS Resonant Mass Sensor With Integrated Optical Manipulation

Characterization of mass and swelling of hydrogel microstructures using MEMS resonant mass sensor arrays.

The use of hydrogels for biomedical engineering, and for the development of biologically inspired cellular systems at the microscale, is advancing at a rapid pace. Microelectromechanical system (MEMS) resonant mass sensors enable the mass measurement of a range of materials. The integration of hydrogels onto MEMS resonant mass sensors is demonstrated, and these sensors are used to characterize ...

Investigation of Air Damping and Q in a Mems Resonant Mass Sensor

INTRODUCTION For a resonant mass sensor, one definition of sensitivity is the ratio of resonant frequency change to mass change. This is not the complete story, however, as the change in resonant frequency needs to be detectable. Thus, the resonator’s Q factor (which is inversely related to damping ratio) is an important characteristic of the resonator. A low Q factor corresponds to a broad res...

Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor

Parametric resonance has been well established in many areas of science, including the stability of ships, the forced motion of a swing and Faraday surface wave patterns on water. We have previously investigated a linear parametrically driven torsional oscillator and along with other groups have mentioned applications including mass sensing, parametric amplification, and others. Here, we thorou...

Integrated Modeling of Optical MEMS Subsystems

Optical MEMS subsystems are complex compositions of varied components that can include optical fibers, freespace and guided wave optics, drive electronics, control systems, MEMS chips, and packaging. Good engineering practice requires that each of these components be designed with the system application in mind. In general, there are two approaches to the design of complex integrated systems. T...

Position control of a MEMS stage with integrated sensor