MEMS Technologies for Ubiquitous Computing World: Electromagnetic Micro Actuator using Micro Coils for Hard Disk Drives

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ژورنال

عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines

سال: 2004

ISSN: 1341-8939,1347-5525

DOI: 10.1541/ieejsmas.124.278