Metastable Tantalum Oxide Formation During the Devitrification of Amorphous Tantalum Thin Films
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چکیده
منابع مشابه
High temperature thermal properties of thin tantalum nitride films
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ژورنال
عنوان ژورنال: Journal of the American Ceramic Society
سال: 2016
ISSN: 0002-7820,1551-2916
DOI: 10.1111/jace.14384