Micro-grooving of brittle materials using textured diamond grinding wheels shaped by an integrated nanosecond laser system

Abstract Freeform surfaces including both the aspherical and prismatic concave/convex have been widely utilized in optical, electronical, biomedical areas. Most recently, it is reported that grinding with structured wheels provides new possibility to generate patterns on hard brittle materials. This paper reports latest research progress micro-grooving glass ceramic using laser diamond wheels. A nanosecond pulse firstly integrated into an ultra-precision machine tool used for in-line conditioning of super abrasive wheels, i.e., truing, dressing, profiling/texturing. Meanwhile, offset compensation method, considering shifting depth focus (DoF) at different irradiation positions, proposed accurately various profiles periphery Three types (riblets, grooves, pillars) are successfully fabricated substrate textured The results indicate system offers high flexibility accuracy shaping a promising solution functional microstructures