Micro-Processing by ArF Excimer Laser
نویسندگان
چکیده
منابع مشابه
Tunable ArF excimer-laser source.
A tunable ArF* (193-nm) excimer source is described that produces over 125 mJ/pulse (peak) at 10 pulses/sec. This device has a spectral width of less than 2 cm(-1) and a demonstrated tunability of nearly 320 cm(-1) from 192.8 to 193.9 nm. Tunability, bandwidth, and mode control are achieved by injecting the fourth anti-Stokes line (in H(2)) of a frequency-doubled dye laser into an ArF* excimer-...
متن کاملArF Excimer Laser Annealing of Polycrystalline Silicon Thin Film
Crystallization of amorphous silicon (a-Si) using excimer laser annealing (ELA) has been reported since 1994 by Watanabe group. It is known as the best method to fabricate a good poly-silicon because it can heat the film up to the melting point and, at the same time no thermal damage occur into the glass substrate (Carluccio et al., 1997; Matsumura and Oh, 1999). ELA technique is widely used to...
متن کاملEffect of the ArF excimer laser on human enamel.
Human enamel surface was irradiated with ArF excimer laser and examined under light microscopy and scanning electron microscopy (SEM). Enamel surface was irradiated at three different areas with different energy fluences. It is demonstrated that the ArF excimer laser causes ablation of the calcified hard enamel tissue. Ablation curves were measured. There was no significant difference found in ...
متن کاملDynamics of cavitation bubble induced by 193 nm ArF excimer laser in concentrated sodium chloride solutions
Cavitation bubbles were generated by the 193 nm argon fluoride excimer laser delivered with a specially designed tip into absorbing NaCl solution. The dynamics of bubble formation and collapse have been studied using fast flash photomicrography. The bubble dimensions were measured at different time delays as a function of the tip exit diameter, the energy fluence of the laser, and the NaCl conc...
متن کاملDynamics of ArF excimer laser-induced cavitation bubbles in gel surrounded by a liquid medium.
BACKGROUND AND OBJECTIVE Cavitation bubbles have been shown to be the driving force of tissue cutting in 193 nm ArF excimer laser-based vitreoretinal microsurgery. In the present work we investigate the dynamics of cavitation bubbles inside a gelatin gel in a saline environment using fast flash microphotography. STUDY DESIGN/MATERIALS AND METHODS The screening influence of the saline medium w...
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ژورنال
عنوان ژورنال: The Review of Laser Engineering
سال: 1998
ISSN: 0387-0200,1349-6603
DOI: 10.2184/lsj.26.421