MICROELECTROMECHANICAL INCKINOMETER
نویسندگان
چکیده
منابع مشابه
Nano- and Microelectromechanical Systems
Nano-and microelectromechanical systems : fundamentals of nano-and microengineering / Sergey Edward Lyshevski. p. cm.-(Nano-and microscience, engineering, technology, and medicine series) Includes index. Includes bibliographical references and index. ISBN 0-8493-916-6 (alk. paper) 1. Microelectromechanical systems. 1. Title. II. Series. TK7875 .L96 2000 621.381—dc201 00-057953 CIP This book con...
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ژورنال
عنوان ژورنال: Bulletin of Kyiv Polytechnic Institute. Series Instrument Making
سال: 2020
ISSN: 2663-3450,0321-2211
DOI: 10.20535/1970.59(1).2020.210007