Micromachined atomic force microprobe with integrated capacitive read-out

Differential read-out circuit for capacitive sensors

Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters

In recent years, medical procedures have become increasingly non-invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual...

Highly Integrated 2-d Capacitive Micromachined Ultrasonic Transducers

bring the signal from the front surface of the transducer scribed in detail. Electrical measurements of the series chip to the hack side. The transducer chip then can be flip-chip bonded to a signal processing chip. This results in sistance and the capacitance of the through wafer via are a very two =hip hybrid that Can be presented and compared with theoretical culations. The ily sealed for i...

AN INTEGRATED SURFACE MICROMACHINED CAPACITIVE LATERAL ACCELEROMETER WITH 2μG/√Hz RESOLUTION

A capacitive position measurement interface minimizes noise from parasitics in the electromechanical interface and uses correlated double sampling to achieve better than 10Å/√Hz displacement resolution. This translates into 2μG/√Hz acceleration resolution when the device is operated in a vacuum.

Analysis of Micromachined Capacitive Incremental Position Sensor

 This article presents an analysis for two related concepts of a capacitive incremental position sensor. In Incremental Capacitance Measurement Mode the periodic change in capacitance is measured to determine the relative displacement between two periodic geometries S1 and S2 with gap-distance of ~ 1 μm. In Constant Capacitance Measurement Mode the distance between S1 and S2 is controlled to k...