Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice

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ژورنال

عنوان ژورنال: Journal of Microelectromechanical Systems

سال: 2012

ISSN: 1057-7157,1941-0158

DOI: 10.1109/jmems.2011.2174416