Molecular dynamic simulation of low-energy FIB irradiation induced damage in diamond
نویسندگان
چکیده
منابع مشابه
Molecular dynamic simulation of low-energy FIB irradiation induced damage in diamond
In this article, a large scale multi-particle molecular dynamics (MD) simulation model was developed to study the dynamic structural changes in single crystal diamond under 5 keV Ga irradiation in conjunction with a transmission electron microscopy (TEM) experiment. The results show that the thickness of ion-induced damaged layer (~ 9.0 nm) obtained from experiments and simulations has good acc...
متن کاملAtomistic investigation of FIB-induced damage in diamond cutting tools under various ion irradiation conditions
Focused Ion Beam (FIB) has been demonstrated as a promising tool to the fabrication of microand nanoscale diamond cutting tools. In-depth understanding of the ion-solid interaction in diamond leading to residual damage under different processing parameters are in high demand for the fabrication of nanoscale diamond tools. Molecular dynamics (MD) simulation method has long been regarded as a pow...
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The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Gaþ ions at various energies (10, 20, 30, and 40 keV) and incident angles (0 , 30 , 45 , and 60 ). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo progr...
متن کاملReview on FIB-induced damage in diamond materials
Background: Although various advanced FIB processing methods for the fabrication of 3D nanostructures have been successfully developed by many researchers, the FIB milling has an unavoidable result in terms of the implantation of ion source materials and the formation of damaged layer at the near surface. Understanding the ion-solid interactions physics provides a unique way to control the FIB ...
متن کاملXe FIB Milling and Measurement of Amorphous Damage in Diamond
Microand nanomachining of diamond using focused ion beam (FIB) continues to generate interest in applications such as diamond anvil cells, photonic devices, micro-cantilevers and tools for imprinting applications [1,2]. However, the milling rate of diamond by FIB is approximate 4X slower when compared to silicon using 30 kV Ga FIB [3]. Recent instrumentation using PFIB technology and Xe ions of...
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2015
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2015.05.023