Motional Mode based Positioning with Improved Acceleration Feedback for Micro-Moving Stage.
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEJ Transactions on Industry Applications
سال: 1996
ISSN: 0913-6339,1348-8163
DOI: 10.1541/ieejias.116.367