Multichannel microprobe electrode array chip.
نویسندگان
چکیده
منابع مشابه
Implantable Multichannel Electrode Array Based on SOI Technology
This work presents a new method of fabricating implantable multielectrode arrays on lightly doped single-crystal silicon. Such arrays are essential tools for electrical stimulation and recording of nerve signals. Our new microfabrication process, based on silicon-on-insulator (SOI) technology, inherently has excellent control over the final probe thickness without wet etching. The needle shanks...
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ژورنال
عنوان ژورنال: The Brain & Neural Networks
سال: 2004
ISSN: 1883-0455,1340-766X
DOI: 10.3902/jnns.11.125