Nano/Micro Patterning of Inorganic Thin Films
نویسندگان
چکیده
منابع مشابه
Submicrometer-Scale Patterning of Ceramic Thin Films
The patterning of ceramic thin films is of great interest for use in MEMS and other applications. However, the complex chemistries of certain materials make the use of traditional photolithography techniques prohibitive. In this paper, a number of low-cost, high throughput techniques for the patterning of ceramic thin films derived from chemical solution precursors, such as sol-gels and ceramic...
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Aalto University, P.O. Box 11000, FI-00076 Aalto www.aalto.fi Author Pia Sundberg Name of the doctoral dissertation Atomic/molecular layer deposition of hybrid inorganic-organic thin films Publisher School of Chemical Technology Unit Department of Chemistry Series Aalto University publication series DOCTORAL DISSERTATIONS 201/2014 Field of research Inorganic Chemistry Manuscript submitted 11 Se...
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ژورنال
عنوان ژورنال: Bulletin of the Chemical Society of Japan
سال: 2008
ISSN: 0009-2673,1348-0634
DOI: 10.1246/bcsj.81.1337