Nonlinear Model Identification and Control of a Rapid Thermal Processing System for Semiconductor Manufacturing
نویسندگان
چکیده
منابع مشابه
Nonlinear Model Reduction Strategies For Rapid Thermal Processing Systems - Semiconductor Manufacturing, IEEE Transactions on
We present a systematic method for developing low order nonlinear models from physically based, large scale finite element models of rapid thermal processing (RTP) systems. These low order models are extracted from transient results of a detailed finite element model using the proper orthogonal decomposition (POD) method. Eigenfunctions obtained from the POD method are then used as basis functi...
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Continuously shrinking device parameters and the enlargement of wafer diameters in semiconductor industry require best temperature homogeneity in Rapid Thermal Processing (RTP). This together with the requirement of high ramp rates in the range of 200 °C s as advantageously used in ultra shallow junction processes [1] challenges temperature control in RTP technology. In order to design advanced...
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ژورنال
عنوان ژورنال: Transactions of the Institute of Systems, Control and Information Engineers
سال: 2001
ISSN: 1342-5668,2185-811X
DOI: 10.5687/iscie.14.124