Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Physics D: Applied Physics
سال: 2017
ISSN: 0022-3727,1361-6463
DOI: 10.1088/1361-6463/aa77dc