Opto-structural studies of well-dispersed silicon nano-crystals grown by atom beam sputtering

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Opto-structural studies of well-dispersed silicon nano-crystals grown by atom beam sputtering

Synthesis and characterization of nano-crystalline silicon grown by atom beam sputtering technique are reported. Rapid thermal annealing of the deposited films is carried out in Ar + 5% H2 atmosphere for 5 min at different temperatures for precipitation of silicon nano-crystals. The samples are characterized for their optical and structural properties using various techniques. Structural studie...

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ژورنال

عنوان ژورنال: Nanoscale Research Letters

سال: 2012

ISSN: 1556-276X

DOI: 10.1186/1556-276x-7-547