PLASMA PARAMETERS AND COMPOSITION IN CF4/O2/Ar GAS MIXTURE
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENIY KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA
سال: 2017
ISSN: 2500-3070,0579-2991
DOI: 10.6060/tcct.2017601.5518