Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
نویسندگان
چکیده
منابع مشابه
Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive eleme...
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Beijing Research Institute of Telemetry, Beijing 100000, China; [email protected] (C.Z.); [email protected] (D.X.H.); [email protected] (X.F.J.); [email protected] (S.M.Z.); [email protected] (J.B.Z.); [email protected] (M.M.W.); [email protected] (W.B.L.); [email protected] (Y.B.G.) * Correspondence: [email protected]; Tel.: +86-10-6819-8271 † Presented at the Eurosensors 2017 Conference, Paris, ...
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ژورنال
عنوان ژورنال: Biomedical Microdevices
سال: 2012
ISSN: 1387-2176,1572-8781
DOI: 10.1007/s10544-012-9661-8