Polymeric lithography editor: Editing lithographic errors with nanoporous polymeric probes
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چکیده
منابع مشابه
Polymeric lithography editor: Editing lithographic errors with nanoporous polymeric probes
A new lithographic editing system with an ability to erase and rectify errors in microscale with real-time optical feedback is demonstrated. The erasing probe is a conically shaped hydrogel (tip size, ca. 500 nm) template-synthesized from track-etched conical glass wafers. The "nanosponge" hydrogel probe "erases" patterns by hydrating and absorbing molecules into a porous hydrogel matrix via di...
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ژورنال
عنوان ژورنال: Science Advances
سال: 2017
ISSN: 2375-2548
DOI: 10.1126/sciadv.1602071