Principle of Fringe Electric Filed Driven Electrostatic Actuator with Ferroelectric Mover and Comb-shaped Electrodes
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2015
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.81.62