Process optimization of graphene growth in a roll-to-roll plasma CVD system
نویسندگان
چکیده
منابع مشابه
High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor
We present the design of a concentric tube (CT) reactor for roll-to-roll chemical vapor deposition (CVD) on flexible substrates, and its application to continuous production of graphene on copper foil. In the CTCVD reactor, the thin foil substrate is helically wrapped around the inner tube, and translates through the gap between the concentric tubes. We use a bench-scale prototype machine to sy...
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In this study, we examined the sensitivity of embossed pattern depth to preheat supply and cooling, and also tested how pattern type and density affect the embossed depth. The main factors such as roller temperature, roller speed, and applied force that mostly affect embossed pattern qualities of roll-to-roll hot embossing were determined based on the response surface methodology. Eight conditi...
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ژورنال
عنوان ژورنال: AIP Advances
سال: 2017
ISSN: 2158-3226
DOI: 10.1063/1.4998770