Quasistatic displacement self-sensing method for cantilevered piezoelectric actuators

Quasistatic displacement self-sensing method for cantilevered piezoelectric actuators.

Piezoelectric meso- and microactuator systems required for manipulation or assembly of microscale objects demand reliable force and/or displacement information. Available sensors are prone to dimension restrictions or precision limitation. Self-sensing method, based on the electric charge measurement, may represent a solution in terms of cost-effectiveness and integration, the actuator performi...

Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators.

This paper presents a new method of self-sensing both of the displacement and the external applied force at the tip of piezoelectric cantilevers. Integrated electric current across piezoelectric actuators is compensated against material nonlinearities (creep, hysteresis) to provide reliable information. We propose to compensate the hysteresis by using the Prandtl-Ishlinskii static approach whil...

Self-Sensing Measurement in Piezoelectric Cantilevered Actuators for Micromanipulation and Microassembly Contexts

This chapter aims to develop a self-sensing technique to measure the displacement and the force in piezoelectric microactuators dedicated to micromanipulation and microassembly contexts. In order to answer the requirements in these contexts, the developed self-sensing should perform a long duration measurement of constant signals (displacement and force) as well as a high precision. Furthermore...

Self-sensing cantilevers with integrated conductive coaxial tips for high-resolution electrical scanning probe metrology

Study of sensitivity and noise in the piezoelectric self-sensing and self-actuating cantilever with an integrated Wheatstone bridge circuit Rev. Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators Rev. Quasistatic displacement self-sensing method for cantilevered piezoelectric actuators Rev. The lateral resolution of many electrical scanning p...

Self-Sensing Solid-State Actuators