Resistivity-based modeling of substrate non-uniformity for low-resistivity substrate
نویسندگان
چکیده
منابع مشابه
Resistivity-based Modeling of Substrate Non-uniformity for Resistance Extraction of Low-Resistivity Substrate
This paper discusses modeling of non-uniform substrate resistivity for substrate resistance extraction. Though substrate resistivity of each substrate layer is frequently assumed to be uniform, doping profile of each substrate layer is not uniform. We present the extraction error of substrate resistance under uniform resistivity assumption. The resistivity models we suggest enable accurate resi...
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This paper suggests the modeling methods of non-uniform substrate resistivity for substrate resistance extraction. Conventional substrate model of uniform resistivity for each substrate layer can cause about 40-80% resistance extraction errors. Though model of simulated doping profile theoretically provides fine accuracy, the doping profile cannot be corrected with measurement results. The step...
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ژورنال
عنوان ژورنال: IEICE Electronics Express
سال: 2014
ISSN: 1349-2543
DOI: 10.1587/elex.11.20130813