RF-MEMS switches with AlN dielectric and their applications

Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated with AlN Contour-Mode Resonators

This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have been monolithically integrated with AlN contour-mode resonators. The dual-beam switch design presented in this paper intrinsically compensates for the residual stress in the deposited films, requires low actuation voltage (5 to 20 V), facilitates active pull-off to open the switch and exhibits f...

Dual Beam Actuation of Piezoelectric AlN RF MEMS Switches Integrated with AlN Contour-mode Resonators

This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have been monolithically integrated with AlN contour-mode resonators. The dual-beam switch design presented in this paper intrinsically compensates for the residual stress in the deposited films, requires low actuation voltage (5-20 V), facilitates active pull-off to open the switch and fast switchin...

RF MEMS Switches for Antenna Applications

RF Micro-Electro-Mechanical (MEM) switches have numerous potential applications from mode switching in cell phones at 1-2 GHz to phased array antennas for space-based radar applications. However, environmental factors such as temperature, humidity, and foreign contaminants play a significant role in switch reliability and lifetime. The effects of these environmental factors must be mitigated to...

RF MEMS and Their Applications

Compact Model of Dielectric Charging in RF MEMS Capacitive Switches

RF MEMS capacitive switches show great potential for use in wireless communication device. However, their widespread insertion in commercial products requires further improvements in their longterm reliability. Dielectric charging is one of the factors that impact switch reliability. Dielectric charging is understood to mean the accumulation of electric charge in the insulating dielectric layer...