Scattering and three-dimensional imaging in surface topography measuring interference microscopy

Surface topography measuring interference microscopy is a three-dimensional (3D) imaging technique that provides quantitative analysis of industrial and biomedical specimens. Many different instrument modalities configurations exist, but they all share the same theoretical foundation. In this paper, we discuss unified framework for 3D image (interferogram) formation in microscopy. We show how scattered amplitude linearly related to surface according Born Kirchhoff approximations highlight main differences similarities each. With reference Ewald McCutchen spheres, relationship between spatial frequencies characterize illuminating waves, those object, are defined formulated as linear filtering process. It shown case near planar surfaces, process can be reduced two dimensions under small height approximation. However, significant additional insight into scanning methods used microscopy, effects such interferometric defocus ways mitigate errors introduced by aberrations optical system. Furthermore, it possible include nonlinear multiple scattering generalized framework. Finally, consider inherent nonlinearities when estimating from recorded interferogram.