Self-assembly technique for MEMS vertical comb electrostatic actuator
نویسندگان
چکیده
منابع مشابه
Self-assembly technique for MEMS vertical comb electrostatic actuator
We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC has shown good electrostatic scanning p...
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ژورنال
عنوان ژورنال: IEICE Electronics Express
سال: 2005
ISSN: 1349-2543
DOI: 10.1587/elex.2.311