Semiconductor Electronics. Characterization of Semiconductor Materials at Sub-Micron Scale Using Scanning Capacitance Microscopy.

Scanning Microwave Microscopy for Semiconductor Failure Analysis

Introduction Failure analysis is a vital process in the development of a new product and/or improvement of existing products in the semiconductor industry. Successful failure analysis can identify the root cause of a failed device and guide through corrective actions. Semiconductor failure analysis often involves a number of different techniques, such as curve tracing, scanning electron microsc...

Simulation Study of Deep Sub-micron and Nanoscale Semiconductor Transistors

A Theoretical Investigation for Electronics Structure of Mg(Bio2)2 Semiconductor Using First Principle Approach

The Mg(BiO2)2 is the orthorhombic crystal system acting as semiconductor in electric devices. To evaluate electronic band structures, the total density of state (TDOS) and the partial density of state (PDOS), Generalized Gradient Approximation (GGA) based on the Perdew–Burke–Ernzerhof (PBE0) was used for Mg(BiO2)2. The band gap was recorded at 0.959 eV, which is supported by a good semiconducto...

CMOS Semiconductor Manufacturing Integration on Sub-micron Gate Spacer

This paper describes the details of a novel manufacturing process integration of CMOS (Complementary Metal-Oxide-Semiconductor) transistor architecture, which is incorporated into a sub-micron logic technology on 300mm wafers. As the gate length is scaling down, the spacer design for CMOS transistor becomes increasingly important especially for high performance. Experimental manufacturing proce...

Characterization of semiconductor materials using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy.

We describe the application of scattering-type near-field optical microscopy to characterize various semiconducting materials using the electron storage ring Metrology Light Source (MLS) as a broadband synchrotron radiation source. For verifying high-resolution imaging and nano-FTIR spectroscopy we performed scans across nanoscale Si-based surface structures. The obtained results demonstrate th...