Simple and Efficient AlN-Based Piezoelectric Energy Harvesters
نویسندگان
چکیده
منابع مشابه
Sic/aln Piezoelectric Energy Harvesters for Pulsed Pressure Sources in Harsh Environment Applications
Piezoelectric micromachined circular diaphragm energy harvesters for pulsed pressure sources have been fabricated and characterized. These devices utilize silicon carbide (SiC) as the structural material and aluminum nitride (AlN) as the active piezoelectric element to enable operation within harsh environments. In particular, the SiC/AlN energy harvesting device yields an output power density ...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2020
ISSN: 2072-666X
DOI: 10.3390/mi11020143