Single-anchor support and supercritical CO_2 drying enable high-precision microfabrication of three-dimensional structures

Large-area microfabrication of three-dimensional, helical polymer structures

A technique has been developed to fabricate polymeric helices with sub-micron dimensions. These helices are made using a double-templating process, in which an inorganic thin film deposited using glancing angle deposition acts as the master. The shape, pitch, handedness and number of turns of the polymer helices can be tuned by altering the deposition parameters of the master film. The structur...

Single-mask microfabrication of three-dimensional objects from strained bimorphs

Recently, techniques known as ‘micro-origami’ or ‘strain architecture’ have emerged for the fabrication of out-of-plane microand nanostructures by relaxation of a pair of strain-mismatched thin films. Applications of such structures include optical reflectors, actuators and micropositioners. We illustrate how control of the folding order can generate complex three-dimensional objects from metal...

High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications

Two-photon excitation microfabrication has been shown to be useful in the field of photonics and biomedicine. It generates 3D microstructures and provides sub-diffraction fabrication resolution. Nevertheless, laser direct writing, the most popular two-photon fabrication technique, has slow fabrication speed, and its applications are limited to prototyping. In this proceeding, we propose high-th...

Assembly and Molding Processes for Three-dimensional Microfabrication Assembly and Molding Processes for Three-dimensional Microfabrication Assembly and Molding Processes for Three-dimensional Microfabrication

Lithographic semiconductor microfabrication has been employed with great success for the manufacture of mechanical structures, achieving microscopic dimensions and great complexity at low cost. However, due to the inherently planar nature of the lithographic process, this technology is limited in its capability to produce three-dimensional structures. In this work, three strategies are presente...

Three-Dimensional Microfabrication by Two-Photon Polymerization