Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range
نویسندگان
چکیده
منابع مشابه
Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range
This paper presents a fabrication process in which all components of an in-plane piezoresistive accelerometer are fabricated simultaneously using a single mask. By dry-etching a silicon-on-insulator (SOI) wafer that has a specific resistivity, piezoresistors are defined and isolated from each other and from the bulk silicon without the pn-junctions normally required in piezoresistive sensors. I...
متن کاملBridge configurations in piezoresistive two-axis accelerometers
In piezoresisitive two-axis accelerometers with two proof masses suspended by cantilever beams, there are generally many ways to configure the Wheatstone bridges. The configurations are different both with respect to functionality and performance. The main distinction is between bridges that contain resistors belonging to both proof masses, and the one bridge that doesn’t. We compare the differ...
متن کاملTriaxial Monolithic Piezoresistive Accelerometers in Foundry CMOS
1996 ii The thesis of Brett Alan Warneke is approved. Figure 3-7 Cross-sectional diagram of an aluminum trace running between oxide plates and contacting a polysilicon piezoresistor. The oxide and first metal overetch into the silicon substrate causes the trace Figure 3-8 SEM of a Skeleton Crew accelerometer with bond wires providing 9.6 µgm of additional proof mass. The plate has been bent up ...
متن کاملA single-mask substrate transfer technique for the fabrication of high-aspect-ratio micromachined structures
In this paper, a single-mask substrate transfer process for the fabrication of high-aspect-ratio (HAR) suspended structures is presented. The HAR silicon structures are fabricated using a deep reactive ion etching (DRIE) technique and then transferred to a glass wafer using silicon/thin film/glass anodic bonding and silicon thinning techniques. The HAR structures are released using self-aligned...
متن کاملDesign Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy
This paper presents a novel structural piezoresistive pressure sensor with four-grooved membrane combined with rood beam to measure low pressure. In this investigation, the design, optimization, fabrication, and measurements of the sensor are involved. By analyzing the stress distribution and deflection of sensitive elements using finite element method, a novel structure featuring high concentr...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2007
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/17/4/009