Study of a MEMS hybrid thermo-PZT micro actuator
نویسندگان
چکیده
منابع مشابه
Micro Contacts and Micro Manipulation with Mems Actuator Arrays
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ژورنال
عنوان ژورنال: Journal of Theoretical and Applied Mechanics
سال: 2016
ISSN: 1429-2955
DOI: 10.15632/jtam-pl.54.4.1309