Suspension Vibration Compensation Using a MEMS Microactuator in Hard Disk Drives
نویسندگان
چکیده
منابع مشابه
Suspension Vibration Compensation Using a Mems Microactuator in Hard Disk Drives
This paper discusses the design and fabrication of a prototype MEMS microactuator and vibration sensors, and controller design for suspension vibration compensation in disk drives. The microactuator utilizes parallel-plates actuation and comb-finger position sensing. An electrical isolation MEMS fabrication technique is utilized to increase the actuation force. An LQG method is proposed for vib...
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ژورنال
عنوان ژورنال: IFAC Proceedings Volumes
سال: 2002
ISSN: 1474-6670
DOI: 10.1016/s1474-6670(17)34022-3