Synthesis and characterization of nanostructured TiO2 and TiO2/W thin films deposited by co-sputtering
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چکیده
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Mechanical Properties and Microstructural Evolution of Ta/TaNx Double Layer Thin Films Deposited by Magnetron Sputtering
Crystalline tantalum thin films of about 500nm thickness were deposited on AISI 316L stainless steel substrate using magnetron sputtering. To investigate the nano-mechanical properties of tantalum films, deposition was performed at two temperatures (25°C and 200°C) on TaNx intermediate layer with different N2/Ar flow rate ratio from 0 to 30%. Nano-indentation was performed to obtain the mechani...
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ژورنال
عنوان ژورنال: Matéria (Rio de Janeiro)
سال: 2018
ISSN: 1517-7076
DOI: 10.1590/s1517-707620180002.0401