Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing

Infrared gas sensors hold great promise in the internet of things and artificial intelligence. Making infrared light sources with miniaturized size, reliable tunable emission is essential but remains challenging. Herein, we present tailorability radiant power emergence new wavelength microelectromechanical system (MEMS)-based thermal emitters nickel oxide (NiO) films. The coating NiO on increases top surface emissivity induces appearance wavelengths between 15 19 µm, all which have been justified by spectroscopic methods. Furthermore, a sensor array assembled for simultaneous monitoring concentrations carbon dioxide (CO 2 ), methane (CH 4 humidity, temperature. platform shows selective sensitive detection at room temperature toward CO CH limits around 50 1750 ppm, respectively, also fast response/recovery good recyclability. demonstrated MEMS their usage provide novel insights designing fabricating optical performance, promising mass production commercialization.